RF Plasma Abatement System

Device Purpose

• RF system for plasma gas abatement

  1. • Used to crack and denature semiconductor byproduct greenhouse gasses such as SF6

Device Features

• Two turn, water cooled, brazed stainless steel plasma coil

• Tunable RF match, backaged into very small space using cutting edge capacitors

• Low inductance copper strapping for ideal load conditions

My key contributions

• Mechanical design and prototype fabrication of plasma coil, chamber, match, and enclosure

• Testing of plasma chamber with prototype software, FTIR, sensor suite, etc.